Low pulsation
The unique drive mechanism of the system determines and maintains optimum movement of the bellows and supply-air switching to give minimum discharge pulsation.

Reduction of air consumption

Reduced air consumption up to 30% compared to our previous models is achieved with no reduction of pump performance.

High sustained pressure capability

The optimum bellows movement improves pressure sustaining capability to maintain stable discharge capacity and pressure under frequent load change, especially in single wafer processing.

Elimination of a dampener

The pump works without the use of a dampener, saving space inside equipment & installation costs such as fluoroplastic joints. The total weight/size of the equipment is also minimized.